Photoelectric device and manufacturing method thereof

ABSTRACT

An optoelectronic device includes a semiconductor substrate, wherein a first transport layer is formed on a first partial region of the semiconductor substrate; a first insulation layer is formed on a second partial region around the first partial region; the first transport layer is formed on the first insulation layer; an interface layer is formed on the first transport layer; a light-emitting material layer containing perovskite material is formed on the interface layer; a second insulation layer is formed on the light-emitting material layer in the second partial region and on the light-emitting material layer near a second partial region side in the first partial region, so that the characteristic size of a single light-emitting pixel or effective working region is adjustable.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of International Patent ApplicationNo. PCT/CN2022/076206 with a filing date of Feb. 14, 2022, designatingthe United States, now pending, and further claims priority to ChinesePatent Application No. 202110392494.2 with a filing date of Apr. 13,2021. The content of the aforementioned applications, including anyintervening amendments thereto, are incorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a semiconductor technology, inparticular to an optoelectronic device.

BACKGROUND OF THE PRESENT INVENTION

As requirements for miniaturization, integration and low powerconsumption of basic components of display products become higher,higher standards are required for unit size and low power consumption ofmicro optoelectronic devices such as light emitting diodes (LEDs). Inrecent years, mini and micro light-emitting diodes (mini-LED andmicro-LED) have attracted extensive attention due to the advantages oflow power consumption, high contrast, high luminance, high responsespeed, high efficiency and so on. Recently, some high-end miniaturizedLED display have been brought to the market, such as “The Wall” displaywall of SAMSUNG and “PixelLED display” of PlayNitride, which have beenrecognized by the industry. Although the existing mini-LED and micro-LEDhave the above advantages, the requirements on quality of III-Vepitaxial semiconductors become stricter; and in a manufacturingprocess, a large number of non-radiative recombination loss channelswill be formed on the side walls of a light-emitting layer, and problemsof mass transfer of mini-LEDs in large panel displays will appear,thereby inevitably increasing the manufacturing cost of products.

In recent years, as novel semiconductor materials, metal halideperovskites have similar properties to III-V materials. As low-costsemiconductor materials which may be prepared by the solution-processedmethod, metal halide perovskites show excellent optoelectronicproperties, such as adjustable band gap, high photoluminescence quantumyield, long carrier diffusion length and narrow band gap. Sinceroom-temperature electroluminescent perovskite LEDs were first realizedin 2014, the technology of preparing an efficient halide perovskite LED(PeLED) has become increasingly mature. Recently, researchers havesuccessfully prepared perovskite light-emitting devices with externalquantum efficiency (EQEs) over 20% and internal quantum efficiency closeto 100%. Although PeLEDs are potential to become substitutes forlow-cost LED technology, how to construct efficient PeLED technologywith micro-pixel size is still difficult.

At present, two technical routes are available for preparing efficientPeLEDs: one is to optimize a radiative recombination process inlow-dimensional and mixed-dimensional perovskite structures, and theother is to suppress a non-radiative recombination process in differentmaterial systems. Although perovskite light-emitting devices with highEQE may be prepared by passivating perovskite thin films and optimizingdevice structures, the preparation of efficient PeLED with a micron chipstructure is still limited. The efficient PeLED has many disadvantages,such as the need to select spray ink with appropriate rheologicalproperties, low-energy electron beam or solution with appropriatesurface tension to prepare less easily damaged min-LED patterns.

In conclusion, how to prepare high-performance, light-emitting andoptoelectronic devices with adjustable pixels or effective workingregions by a low-cost process will become a future technical directionof the industry and an urgent demand of the market.

SUMMARY OF PRESENT INVENTION

The present application provides a manufacturing method of anoptoelectronic device. A characteristic size of a single light-emittingpixel or effective working region of the optoelectronic device is lessthan or equal to 500 microns; the method comprises: S1: providing asemiconductor substrate; S2: forming a photoresist layer; S3: using amask for exposing and developing the photoresist layer, so that a firstpartial region on the semiconductor substrate is protected by theremaining photoresist layer, and a second partial region around thefirst partial region is exposed; S4: forming a first insulation layer,wherein the first insulation layer covers an upper surface of theremaining photoresist layer and an upper surface of the semiconductorsubstrate corresponding to the second partial region, and the thicknessof the photoresist layer is greater than that of the first insulationlayer; S5: performing a photoresist stripping process to remove theremaining photoresist layer and the first insulation layer on theremaining photoresist layer; S6: forming a first transport layer, andmaking the first transport layer cover the upper surface of the firstinsulation layer and the semiconductor substrate in the first partialregion; S7: forming an interface layer on the first transport layer; S8:forming a light-emitting material layer on the interface layer; S9:forming a second insulation layer, and making the second insulationlayer cover a light-emitting material layer in the second partial regionand a light-emitting material layer near a second partial region side inthe first partial region, so that a central region in the first partialregion is not covered by the second insulation layer; and S10: formingan electron transport layer in the central region of the first partialregion.

Further, the method further comprises S11: forming a metal electrode onthe electron transport layer in the central region of the first partialregion, and extending the metal electrode to the second insulation layerat one side of the central region.

Further, the first transport layer is a hole transport layer.

Further, the interface layer is a lithium fluoride layer.

Further, the material of the first insulation layer is any one ofsilicon dioxide, aluminum oxide, silicon nitride, silicon carbide andaluminum nitride, or a combination of multiple materials.

Further, the light-emitting material layer is a perovskite materiallayer.

Further, the light-emitting material layer is a combination ofperovskite materials and one or more of organic materials, III-Vmaterials, II-VI materials, IV materials, rare earth materials, oxidematerials, semiconductor nanomaterials and insulation materials.

Further, the light-emitting material layer is in direct contact with theinterface layer.

Further, the size of the electron transport layer is adjusted byadjusting the size of the light-emitting material layer covered by thesecond insulation layer in the first partial region and adjusting thesize of the central region not covered by the second insulation layer inthe first partial region.

Further, the second insulation layer is a lithium fluoride layer.

Further, the position where the second insulation layer is formed islimited by the mask, so that only the light-emitting material layer neara second partial region side in the first partial region is covered bythe second insulation layer.

Further, the position where the electron transport layer is formed islimited by the mask, so that the electron transport layer is only formedin the central region of the first partial region.

The present invention further provides an optoelectronic device, whereina characteristic size of a single light-emitting pixel or effectiveworking region of the optoelectronic device is less than or equal to 500microns; the optoelectronic device comprises a semiconductor substrate,wherein a first transport layer is formed on a first partial region ofthe semiconductor substrate; a first insulation layer is formed on asecond partial region around the first partial region; the firsttransport layer is formed on the first insulation layer; an interfacelayer is formed on the first transport layer; a light-emitting materiallayer is formed on the interface layer; a second insulation layer isformed on the light-emitting material layer in the second partial regionand on the light-emitting material layer near a second partial regionside in the first partial region; and an electron transport layer isformed on the light-emitting material layer in the central region in thefirst partial region.

Further, the first transport layer is a hole transport layer.

Further, the interface layer and the second insulation layer are lithiumfluoride layers.

Further, the light-emitting material layer is a perovskite materiallayer.

Further, the light-emitting material layer is in direct contact with theinterface layer.

Further, the size of the electron transport layer is adjusted byadjusting the size of the light-emitting material layer covered by thesecond insulation layer in the first partial region and adjusting thesize of the central region not covered by the second insulation layer inthe first partial region.

Further, the material of the first insulation layer is any one ofsilicon dioxide, aluminum oxide, silicon nitride, silicon carbide andaluminum nitride, or a combination of multiple materials.

DESCRIPTION OF THE DRAWINGS

FIGS. 1-12 are sectional schematic diagrams of one of manufacturingprocesses of an optoelectronic device according to an embodiment of thepresent invention.

FIGS. 13A, 13B, and 13C are schematic diagrams of optoelectronicproperty test data of an optoelectronic device according to anembodiment of the present application and an optoelectronic deviceformed by manufacturing the optoelectronic device according to anembodiment of the present application.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Technical solutions in embodiments in the present invention will bedescribed clearly and completely below in combination with theaccompanying drawings. Apparently, the described embodiments are part ofembodiments of the present invention, but not all of the embodiments.All other embodiments obtained by those ordinary skilled in the artwithout contributing creative labor based on the embodiments of thepresent invention will fall within the protection scope of the presentinvention.

It should be understood that the present invention may be implemented indifferent forms and should not be construed as to be limited to theembodiments proposed here. On the contrary, these embodiments areprovided to make the disclosure thorough and complete, and will fullyconvey the scope of the present invention to those skilled in the art.In the accompanying drawings, sizes and relative sizes of layers andregions may be exaggerated for clarity; and the same reference numeralsindicate the same elements throughout. It should be understood that whenan element or layer is referred to as being “on”, “adjacent to”,“connected to” or “coupled to” other elements or layers, the element orlayer may be directly on, adjacent to, connected to or coupled to otherelements or layers, or an intervening element or layer may exist. On thecontrary, when an element is referred to as being “directly on”,“directly adjacent to”, “directly connected to” or “directly coupled to”other elements or layers, no intervening element or layer exists. Itshould be understood that although the terms such as first, second andthird, may be used for describing various elements, components, regions,layers and/or parts, these elements, components, regions, layers and/orparts should not be limited by these terms. These terms are only usedfor distinguishing one element, part, region, layer or part from anotherelement, component, region, layer or part. Therefore, without departingfrom teaching of the present invention, a first element, component,region, layer or part discussed below may be represented as a secondelement, component, region, layer or part.

Spatial relation terms such as “below”, “under”, “lower”, “underneath”,“above” and “upper” may be used here for the convenience of descriptionto describe relations between one element or characteristic shown infigures and other elements or characteristics. It should be understoodthat, besides the orientations shown in the figures, the spatialrelation terms are further intended to include different orientations ofdevices in use and operation. For example, if a device in the figures isturned upside down, then elements or characteristics described to be“below” or “under” or “underneath” other elements or characteristicswill be oriented to be “above” other elements or characteristics.Therefore, the exemplary terms “below” and “under” may include bothupper and lower orientations. The device may be otherwise oriented(rotated by 90 degrees or other orientations), and the spatialdescription used here is explained accordingly.

The terms used here are only available for describing specificembodiments and are not to be taken as a limitation to the presentinvention. As used here, “a”, “an” and “said/the” representing singularforms are also intended to include plural forms, unless the contextclearly indicates otherwise. It should also be understood that the terms“form” and/or “comprise” when used in the specification specify thepresence of the characteristics, integers, steps, operations, elementsand/or components, but do not exclude the presence or addition of one ormore other characteristics, integers, steps, operations, elements,components and/or groups. As used here, the term “and/or” includes anyand all combinations of related listed items.

Technical solutions in embodiments of the present invention will bedescribed clearly and completely below in combination with theaccompanying drawings. Apparently, the described embodiments are part ofembodiments of the present invention, but not all of the embodiments.All other embodiments obtained by those ordinary skilled in the artwithout contributing creative labor based on the embodiments of thepresent invention will fall within the protection scope of the presentinvention.

An embodiment of the present invention provides a manufacturing methodof an optoelectronic device, wherein a characteristic size of a singlelight-emitting pixel or effective working region of the optoelectronicdevice is less than or equal to 500 microns. Taking PeLED as an example,generally, if the characteristic size of a single light-emitting pixelor effective working region is greater than or equal to 200 microns andless than 500 microns, the PeLED is a mini-PeLED; and if thecharacteristic size of a single light-emitting pixel or effectiveworking region is less than or equal to 200 microns, the PeLED is amicro-PeLED. Please refer to sectional schematic diagrams of one ofmanufacturing processes of an optoelectronic device according to anembodiment of the present invention shown in FIGS. 1-12 . Specifically,the manufacturing method of the optoelectronic device according to anembodiment of the present invention comprises:

S1: providing a semiconductor substrate;

As shown in FIG. 1 , a semiconductor substrate 1 is provided; thesemiconductor substrate 1 may be made of any material serviceable as asubstrate, such as conductive glass (FTO), silicon substrate,polytetrafluoroethylene (PTFE) and piezoelectric ceramic.

Generally, the semiconductor substrate may be cleaned with deionizedwater, acetone, isopropanol, deionized water and isopropanol by fivesteps for 15 min before use. The cleaned semiconductor substrate isplaced in a UV ozone cleaner for ozone cleaning for 30 min.

S2: forming a photoresist layer;

As shown in FIG. 2 , a photoresist layer 2 is formed on thesemiconductor substrate 1. The photoresist layer 2 may be formed bynegative photoresist solution or positive photoresist solution. Forexample, 50 μL of negative photoresist solution may be sucked by apipette with a measurement range of 100 μL, and coated on thesemiconductor substrate 1; and a vacuum spin coater is turned on tospin-coat for 60 s at 4000 r.p.m., so that the photoresist layer 2 witha thickness of about 420 nm may be obtained. Preferably, the thicknessof the photoresist layer 2 is 420 nm. Certainly, the thickness of thephotoresist layer 2 may deviate from 420 nm; and the deviation may be20%, preferably 10%, more preferably 5%. Specifically, the thickness maybe any value between 380 nm and 460 nm.

S3: using a mask for exposing and developing the photoresist layer, sothat a first partial region on the semiconductor substrate is protectedby the remaining photoresist layer, and a second partial region aroundthe first partial region is exposed;

As shown in FIG. 4 , the first partial region 11 on the semiconductorsubstrate 1 is protected by the remaining photoresist layer 21, and thesecond partial region 12 around the first partial region 11 is exposed,i.e., the semiconductor substrate 1 corresponding to the second partialregion 12 is exposed.

Specifically, taking the negative photoresist as an example, a structureformed after step S2 is placed on the mask and exposed with a UV lightsource (λ=365 nm, 100 mJ cm⁻²) for 7-8 s to obtain an exposed negativephotoresist as shown in FIG. 3 . Then, the structure is rinsed withisopropyl alcohol (IPA) for several times to wash off the unexposednegative photoresist, and then baked on a heating stage at 85° C. for 20min to obtain a structure as shown in FIG. 4 .

S4: forming a first insulation layer, wherein the first insulation layercovers an upper surface of the remaining photoresist layer and an uppersurface of the semiconductor substrate corresponding to the secondpartial region, and the thickness of the photoresist layer is greaterthan that of the first insulation layer;

As shown in FIG. 5 , a first insulation layer 3 is formed, the firstinsulation layer 3 covers the upper surface of the remaining photoresistlayer 21 (i.e., the photoresist layer in the first partial region 11)and the upper surface of the exposed semiconductor substrate 1 (i.e.,the semiconductor substrate corresponding to the second partial region12); and the thickness of the photoresist layer 21 is greater than thatof the first insulation layer 3. Specifically, in one embodiment, thethickness of the first insulation layer is any value between 40 nm and80 nm. Preferably, the thickness of the first insulation layer is 60 nm.

In one embodiment, the material of the first insulation layer 3 may beany one of silicon dioxide (SiO₂), aluminum oxide (Al₂O₃), siliconnitride (Si₃N₄), silicon carbide (SiC) and aluminum nitride (AlN) or acombination of multiple materials. Preferably, the material of the firstinsulation layer 3 is silicon dioxide (SiO₂) or aluminum oxide (Al₂O₃).In one embodiment, the first insulation layer 3 is formed by at leastone process of magnetron sputtering, MOCVD, thermal evaporation and thelike.

S5: performing a photoresist stripping process to remove the remainingphotoresist layer and the first insulation layer on the remainingphotoresist layer;

As shown in FIG. 6 , the remaining photoresist layer 21 and the firstinsulation layer 3 on the remaining photoresist layer 21 are removed, sothat the semiconductor substrate 1 in the first partial region 11 isexposed, while the first insulation layer 3 in the second partial region12 is retained. Specifically, the structure formed in step S4 is soakedin a photoresist removing solution for 12 hours to remove thephotoresist, so that a structure as shown in FIG. 6 is obtained. Then,the structure is sequentially rinsed with deionized water, acetone andisopropyl alcohol for 5 min, and is placed in the UV ozone cleaner forozone cleaning for 30 min.

S6: forming a first transport layer, and making the first transportlayer cover the upper surface of the first insulation layer and thesemiconductor substrate in the first partial region;

Specifically, as shown in FIG. 7 , the first transport layer 4 coversthe upper surface of the first insulation layer 3 and the semiconductorsubstrate 1 in the first partial region 11.

In one embodiment, the first transport layer 4 is a hole transportlayer. In one embodiment, the first transport layer comprises nickeloxide (NiO_(x)) and poly(9-vinylcarbazole) (PVK). Nickel oxide (NiO_(x))powder may be purchased from Beijing HuaMin New Materials TechnologyCo., Ltd., and dispersed in deionized water, with a concentration of 15mg/mL. 50 μL of NiO_(x) solution is sucked with a pipette with ameasurement range of 100 μL, and coated on the structure formed in stepS5; a vacuum spin coater is turned on to spin-coat for 60 s at 4000r.p.m.; and the structure spin-coated with NiO_(x) is placed on theheating stage for annealing at 150° C. for 15 min. Then, the structureis transferred into a glove box filled with high-purity nitrogen, and isspin-coated with PVK on the vacuum spin coater. PVK is purchased fromSigma-aldrich, has an average molecular weight of 25,000-50,000, and isdissolved in chlorobenzene (CB), with a concentration of 6 mg/mL; 50 μLof PVK solution is sucked with a pipette with a measurement range of 100μL for coating; the vacuum spin coater is turned on to spin-coat for 60s at 4500 r.p.m.; and then the structure is placed on the heating stagefor annealing at 150° C. for 30 min.

The hole transport layer may be an organic hole transport layer and aninorganic hole transport layer, wherein the organic hole transport layerincludes, but is not limited to, at least one of TFB, PTAA, TAPC,PEDOT:PSS, Poly-TPD, PVK, TCTA, CBP, TPD, CuPc, M-MTDATA, NPB andRubrene; and the inorganic hole transport layer includes, but is notlimited to, at least one of copper oxide (CuO), nickel oxide(NiO_(x)),molybdenum trioxide (MoO₃), tungsten trioxide (WO₃) andvanadium pentoxide (V₂O₅).

In one embodiment, the thickness of the first transport layer 4 may bedesigned according to requirements of different devices.

S7: forming an interface layer on the first transport layer;

As shown in FIG. 8 , an interface layer 5 is formed on the firsttransport layer 4. In one embodiment, the interface layer 5 is a lithiumfluoride (LiF) layer; and the interface layer 5 may be one or acombination of more of sodium fluoride (NaF), potassium fluoride (KF),rubidium fluoride (RbF), cesium fluoride (CsF), magnesium fluoride(MgF₂) and calcium fluoride (CaF₂). In one embodiment, the thickness ofthe interface layer 5 is any value between 0.7 nm and 1.3 nm; andpreferably, the thickness of the interface layer 5 is 1 nm. In oneembodiment, the structure formed in step S6 is transferred to a vacuumcoater for evaporation of a polar interface, such as LiF. The vacuumevaporation pressure is 5×10⁻⁴ Pa; the evaporation rate is measured by aquartz crystal resonator; and the evaporation rate is 0.1 nm/s until theevaporation is finished.

The interface layer 5 may play a role of insulation.

S8: forming a light-emitting material layer on the interface layer;

As shown in FIG. 9 , a light-emitting material layer 6 is formed on theinterface layer 5. The light-emitting material layer 6 may be made ofany electroluminescent material; and any electroluminescent materialcurrently available or produced with the development of technology fallswithin the protection scope of the present application, such as organiclight-emitting materials, perovskite materials, quantum dot materials orthe like. Preferably, in one embodiment, the light-emitting materiallayer 6 is a perovskite material layer. As a novel semiconductormaterial, metal halide perovskite has similar properties to III-Vmaterials. As a low-cost semiconductor material which may be prepared bya solution method, metal halide perovskite shows excellentoptoelectronic properties, such as adjustable band gap, highfluorescence quantum yield, long carrier diffusion length and narrowlight-emitting band gap. In one embodiment, the light-emitting materiallayer is a combination of perovskite materials and one or more oforganic materials, III-V materials, II-VI materials, IV materials, rareearth materials, oxide materials, semiconductor nanomaterials andinsulation materials, wherein the organic materials include smallmolecules and polymers.

For example, the light-emitting material layer 6 is a perovskitematerial layer; and the structure formed after step S7 is transferred toa glove box filled with high-purity nitrogen, for being spin-coated withthe perovskite material layer as the light-emitting material layer 6.Specifically, a perovskite precursor solution isMOPEA_(n)Cs_(x)FA_(1−x)PbnBr_(3n+1), which is formed by dissolving 110mg of lead bromide (PbBr₂), 64 mg of cesium bromide (CsBr), 6 mg offormamidine hydroiodate (FABr) and 28 mg of2-(4-methoxyphenyl)ethylamine hydrobromide (MOPEABr) and 5.5 mg of18-crown-6 in 1 mL of dimethyl sulfoxide (DMSO) solution, with asolution concentration of 0.3 M. Then, 50 μL of the prepared 0.3 Mperovskite precursor solution is sucked and coated on the interfacelayer 5 by spin-coating at 4000 r.p.m for 60 s; and the obtainedstructure is annealed at 70° C. for 10 min.

In one embodiment, a structural formula of the perovskite material layeris ABX₃, wherein the A site is a monovalent cation, the B site is adivalent cation, and the X site is a halogen anion. A-site cationsinclude: cesium ion (CO, methylamine ion (MA⁺), formamidine ion (FA⁺),ethylamine ion (EA⁺), hydrazine ion (HA⁺), guanidine ion (GA⁺),isopropylamine ion (IPA⁺), imidazole ion (IA⁺) and like. B-site cationsinclude: lead ions (Pb²⁺), tin ions (Sn²⁺), germanium ions (Ge²⁺),indium ions (In²⁺), bismuth ions (Bi²⁺) and the like. X-site anionsinclude: chloride ion (Cl⁻), bromide ion (Br), iodide ion (I⁻) and thelike. The perovskite material layer may be one or a combination of moreof one-dimensional, quasi-two-dimensional and three-dimensionalcomponents.

In one embodiment, the thickness of the light-emitting material layer 6may be designed according to requirements of different devices.

In addition, the light-emitting material layer 6 is located on theinterface layer 5; specifically, the light-emitting material layer 6 isin direct contact with the interface layer 5, so that the light-emittingmaterial is easier to spread, and the light-emitting material, such asperovskite solution, will be more closely combined with the interfacelayer 5 on the interface layer 5, thereby improving the flatness of thesurface of the formed light-emitting material layer 6.

S9: forming a second insulation layer, and making the second insulationlayer cover a light-emitting material layer in the second partial regionand a light-emitting material layer near a second partial region side inthe first partial region, so that a central region in the first partialregion is not covered by the second insulation layer;

As shown in FIG. 10 , the second insulation layer 7 covers thelight-emitting material layer 6 in the second partial region 12 and thelight-emitting material layer 6 near the second partial region 12 sidein the first partial region 11, so that the light-emitting materiallayer 6 in the central region 111 in the first partial region 11 (i.e.,a region other than the region covered by the second insulation layer 7in the first partial region 11) is not covered by the second insulationlayer 7, but the light-emitting material layer 6 in the central region111 is exposed. In one embodiment, the size of the central region 111not covered by the second insulation layer 7 in the first partial region11 is adjusted by adjusting the size of the light-emitting materiallayer 6 covered by the second insulation layer 7 in the first partialregion 11.

In one embodiment, the second insulation layer 7 is a lithium fluoride(LiF) layer; and the second insulation layer 7 may be one or acombination of more of sodium fluoride (NaF), potassium fluoride (KF),rubidium fluoride (RbF), cesium fluoride (CsF), magnesium fluoride(MgF₂), calcium fluoride (CaF₂) and the like. In one embodiment, thethickness of the second insulation layer 7 is any value between 24 nmand 36 nm; and preferably, the thickness of the second insulation layer7 is 30 nm. In one embodiment, the structure formed in step S8 is placedin the vacuum coater for evaporation of lithium fluoride (LiF)insulation layer; the vacuum evaporation pressure is 5×10⁻⁴ Pa; theevaporation rate is measured by a quartz crystal resonator; and theevaporation rate is 0.4 nm/s until the evaporation is finished. In oneembodiment, the position where the second insulation layer 7 is formedis limited by a mask, so that the first partial region 11 is notcompletely covered by the second insulation layer 7, and only thelight-emitting material layer near the second partial region 12 side iscovered by the second insulation layer 7.

S10: forming an electron transport layer in the central region of thefirst partial region.

As shown in FIG. 11 , the electron transport layer 8 is formed, so thatthe formed electron transport layer 8 only covers the central region 111in the first partial region 11.

In one embodiment, the electron transport layer 8 is formed by anevaporation process. The name of the electron transport layer 8 is 2,2′, 2″-(1, 3, 5-benzimidazole)-tri(1-phenyl-1-H-benzimidazole) (TPBi);the vacuum evaporation pressure is 5×10⁻⁴ Pa; the evaporation rate ismeasured by a quartz crystal resonator; and the evaporation rate is 0.4nm/s until the evaporation is finished. In one embodiment, the thicknessof the electron transport layer 8 is any value between 40 nm and 50 nm;and preferably, the thickness of the electron transport layer 8 is 45nm.

In one embodiment, the position where the electron transport layer 8 isformed is limited by a mask, so that the electron transport layer 8 isonly formed in the central region 111 in the first partial region 11.

The electron transport layer 8 may be divided into two categories:organic electron transport layer and inorganic electron transport layer,wherein the organic electron transport layer includes, but is notlimited to, at least one of TPBi, BAlq, Phen-m-PhDPO, POPy₂, PO-T2T,Alq₃, B₃PYMPM and the like; and the inorganic electron transport layerincludes, but is not limited to, at least one of Ga₂O₃, Si₃N₄, ZrO₂,V₂O₅, Al₂O₃, NiO_(x), MoO₃, ZnO, MgO, NiO, SnO₂, TiO₂ and the like.

As mentioned above, in the present application, the size of thelight-emitting material layer 6 covered by the second insulation layer 7in the first partial region may be adjusted, so that the size of thesubsequently formed electron transport layer may be adjusted, i.e., alight-emitting area of the optoelectronic device may be adjusted;further, the characteristic size of a single light-emitting pixel oreffective working region may be adjusted, i.e., the second insulationlayer is taken as a characteristic size limiting layer and is combinedwith the first insulation layer to realize mini and micro optoelectronicdevices, thereby not only optimizing the structure of the devices, butalso solving problems of low EQE, low luminance and large leakagecurrent of mini and micro optoelectronic devices; and in addition, theoptoelectronic device provided by the present application ismanufactured without an etching process, to avoid defects of many deadpixels, difficult processing, long time consumption and the like of theoptoelectronic devices in mass preparation due to serious damage to thelight-emitting material layers caused by chemical corrosion and ion beamor electron beam etching in the etching process.

In one embodiment, further, the manufacturing method of theoptoelectronic device also comprises: S11: forming a metal electrode onthe electron transport layer in the central region of the first partialregion, and extending the metal electrode to the second insulation layerat one side of the central region.

As shown in FIG. 12 , the metal electrode 9 covers the electrontransport layer 8 in the central region 111 of the first partial region11, and extends to the second insulation layer 7 at a right side of thecentral region 111, to form a strip-shaped metal electrode 9.

In one embodiment, the metal electrode 9 is formed by a metal electrodeevaporation process. In one embodiment, a region where the metalelectrode 9 is formed is limited by a mask. In one embodiment, the widthof the metal electrode 9 is any value between 150 μm and 250 μm. In oneembodiment, an electrode material LiF and metal Al are sequentiallyevaporated in the process of metal electrode evaporation; theevaporation rate is measured by a quartz crystal resonator; theevaporation rate of LiF is 0.1 nm/s; the thickness of LiF is any valuebetween 0.8 nm and 1.2 nm; and the thickness of Al electrode is anyvalue between 80 nm and 120 nm. Preferably, the thickness of LiF is 1nm; and the thickness of Al electrode is 100 nm. In one embodiment, themetal electrode has high-conductivity oxides and metal materials; thehigh-conductivity oxides include transparent electrodes such as ITO, FTOand TCO; and the metal materials include Al, Mg, Ca, Ag, Cu, Mg:Ag,Li:Al, Mn and the like.

Please continue to refer to FIG. 12 , one embodiment of the presentinvention further provides an optoelectronic device. The characteristicsize of a single light-emitting pixel or effective working region of theoptoelectronic device is less than or equal to 500 microns; and theoptoelectronic device comprises:

a semiconductor substrate 1, wherein a first transport layer 4 is formedon a first partial region 11 of the semiconductor substrate 1; a firstinsulation layer 3 is formed on a second partial region 12 around thefirst partial region 11; and the first transport layer 4 is formed onthe first insulation layer 3;

An interface layer 5 is formed on the first transport layer 4;

A light-emitting material layer 6 is formed on the interface layer 5;

A second insulation layer 7 is formed on the light-emitting materiallayer 6 in the second partial region 12 and on the light-emittingmaterial layer 6 near a second partial region 12 side in the firstpartial region 11; and an electron transport layer 8 is formed on thelight-emitting material layer 6 in the central region 111 in the firstpartial region 11.

In one embodiment, the thickness of the first insulation layer is anyvalue between 40 nm and 80 nm; the thickness of the interface layer isany value between 0.7 nm and 1.3 nm; the thickness of the secondinsulation layer is any value between 24 nm and 36 nm; and the thicknessof the electron transport layer is any value between 40 nm and 50 nm.Preferably, the thickness of the first insulation layer is 60 nm; thethickness of the interface layer 5 is 1 nm; the thickness of the secondinsulation layer 7 is 30 nm; and the thickness of the electron transportlayer 8 is 45 nm.

In one embodiment, the thicknesses of the first transport layer 4 andthe light-emitting material layer 6 may be designed according torequirements of different devices.

In one embodiment, the semiconductor substrate 1 may be made of anymaterial serviceable as a substrate, such as conductive glass, siliconsubstrate, polytetrafluoroethylene (PTFE) and piezoelectric ceramic.

In one embodiment, the material of the first insulation layer 3 may beany one of silicon dioxide (SiO₂), aluminum oxide (Al₂O₃), siliconnitride (Si₃N₄), silicon carbide (SiC) and aluminum nitride (AlN) or acombination of multiple materials. Preferably, the material of the firstinsulation layer 3 is silicon dioxide (SiO₂) or aluminum oxide (Al₂O₃).

In one embodiment, the first transport layer 4 is a hole transportlayer. In one embodiment, the first transport layer comprises nickeloxide (NiO_(x)) and poly(9-vinylcarbazole) (PVK). The hole transportlayer may be an organic hole transport layer and an inorganic holetransport layer, wherein the organic hole transport layer includes, butis not limited to, at least one of TFB, PTAA, TAPC, PEDOT:PSS, Poly-TPD,PVK, TCTA, CBP, TPD, CuPc, M-MTDATA, NPB and Rubrene; and the inorganichole transport layer includes, but is not limited to, at least one ofcopper oxide (CuO), nickel oxide (NiO_(x)),molybdenum trioxide (MoO₃),tungsten trioxide (WO₃) and vanadium pentoxide (V₂O₅).

In one embodiment, the interface layer 5 is a lithium fluoride (LiF)layer; and the interface layer 5 may be one or a combination of more ofsodium fluoride (NaF), potassium fluoride (KF), rubidium fluoride (RbF),cesium fluoride (CsF), magnesium fluoride (MgF₂) and calcium fluoride(CaF₂). The interface layer 5 may play a role of insulation.

The light-emitting material layer 6 may be made of anyelectroluminescent material; and any electroluminescent materialcurrently available or produced with the development of technology fallswithin the protection scope of the present application, is preferably aperovskite material, may also be a combination of perovskite materialand one or more of organic materials, III-V materials, II-VI materials,IV materials, rare earth materials, oxide materials, semiconductornanomaterials, insulation materials and the like. Preferably, in oneembodiment, the light-emitting material layer 6 is a perovskite materiallayer. As a novel semiconductor material, metal halide perovskite hassimilar properties to III-V materials. As a low-cost semiconductormaterial which may be prepared by a solution method, metal halideperovskite shows excellent optoelectronic properties, such as adjustableband gap, high fluorescence quantum yield, long carrier diffusion lengthand narrow light-emitting band gap. In one embodiment, a structuralformula of the perovskite material layer is ABX₃, wherein the A site isa monovalent cation, the B site is a divalent cation, and the X site isa halogen anion. A-site cations include: cesium ion (CO, methylamine ion(MA⁺), formamidine ion (FA⁺), ethylamine ion (EA⁺), hydrazine ion (HA⁺),guanidine ion (GA⁺), isopropylamine ion (IPA⁺), imidazole ion (IA⁺) andlike. B-site cations include: lead ions (Pb²⁺), tin ions (Sn²⁺),germanium ions (Ge²⁺), indium ions (In²⁺), bismuth ions (Bi²⁺) and thelike. X-site anions include: chloride ion (Cl⁻), bromide ion (Br),iodide ion (I⁻) and the like. The perovskite material layer may be oneor a combination of more of one-dimensional, quasi-two-dimensional andthree-dimensional components.

In addition, the light-emitting material layer 6 is located on theinterface layer 5; specifically, the light-emitting material layer 6 isin direct contact with the interface layer 5, so that the light-emittingmaterial is easier to spread, and the light-emitting material, such asperovskite solution, will be more closely combined with the interfacelayer 5 on the interface layer 5, thereby improving the flatness of thesurface of the formed light-emitting material layer 6.

As shown in FIG. 12 , the second insulation layer 7 covers thelight-emitting material layer 6 in the second partial region 12 and thelight-emitting material layer 6 near the second partial region 12 sidein the first partial region 11, so that the light-emitting materiallayer 6 in the central region 111 in the first partial region 11 is notcovered by the second insulation layer 7, but the light-emittingmaterial layer 6 in the central region 111 is exposed. In oneembodiment, the size of the central region 111 not covered by the secondinsulation layer 7 in the first partial region 11 is adjusted byadjusting the size of the light-emitting material layer 6 covered by thesecond insulation layer 7 in the first partial region 11.

In one embodiment, the second insulation layer 7 is a lithium fluoride(LiF) layer; and the second insulation layer 7 may be one or acombination of more of sodium fluoride (NaF), potassium fluoride (KF),rubidium fluoride (RbF), cesium fluoride (CsF), magnesium fluoride(MgF₂), calcium fluoride (CaF₂) and the like.

As shown in FIG. 12 , the electron transport layer 8 only covers thecentral region 111 in the first partial region 11. The electrontransport layer 8 may be divided into two categories: organic electrontransport layer and inorganic electron transport layer, wherein theorganic electron transport layer includes, but is not limited to, atleast one of TPBi, BAlq, Phen-m-PhDPO, POPy₂, PO-T2T, Alq₃, B3PYMPM andthe like; and the inorganic electron transport layer includes, but isnot limited to, at least one of Ga₂O₃, Si₃N₄, ZrO₂, V₂O₅, Al₂O₃,NiO_(x), MoO₃, ZnO, MgO, NiO, SnO₂, TiO₂ and the like.

In the present application, the size of the light-emitting materiallayer 6 covered by the second insulation layer 7 in the first partialregion may be adjusted, so that the size of the subsequently formedelectron transport layer may be adjusted, i.e., a light-emitting area ofthe optoelectronic device may be adjusted; further, the characteristicsize of a single light-emitting pixel or effective working region may beadjusted, i.e., the second insulation layer is taken as a characteristicsize limiting layer and is combined with the first insulation layer torealize mini and micro optoelectronic devices, thereby not onlyoptimizing the structure of the devices, but also solving problems oflow EQE, low luminance and large leakage current of mini and microoptoelectronic devices.

In one embodiment, further, the optoelectronic device also comprises ametal electrode 9; and the metal electrode 9 covers the electrontransport layer 8 in the central region 111 of the first partial region11 and extends to the second insulation layer 7 at one side of thecentral region 111.

In one embodiment, the optoelectronic device is an LED. However, theoptoelectronic device provided by the present invention may also beextended to other optoelectronic device fields, including but notlimited to solar cells, photodetectors, fluorescent films, phosphorpowder, semiconductor transistors, laser optoelectronic devices andmaterials and the like. The mini and micro LEDs manufactured by themethod provided by the present application may be applied to displaysscreens (screens of electronic products such as high-end televisions,mobile phones, computers and iPad), smart watches, wearable devices, ARsmart glasses, mini-projectors and the like. The mini and micro LEDs mayalso be combined with a flexible substrate to realize flexible display.The mini LEDs may also be used for realizing backlight displays (TVscreens, car monitors and the like), RGB small-pitch displays and thelike.

The optoelectronic device provided by the present application and theoptoelectronic device formed by the manufacturing method of theoptoelectronic device provided by the present application are tested.For example, the optoelectronic device is an LED; the EQE is tested withan OLED photoelectric test system; the system consists of a luminancemeter, a Keithley 2400 source meter, an upper computer, an industrialcontrol camera CCD, a sample test bench and the like; the luminancemeter is used for detecting a spectrum and spectral power of an LED; asa power source of the LED, the Keithley 2400 source meter is responsiblefor power output and current detection; positive and negative wires ofthe Keithley 2400 source meter are led out to be connected with positiveand negative electrodes of the LED; the voltage loaded to light-emittingdevice is 1 V-5 V; the voltage step interval is 0.1 V; current passingthrough the LED is measured by a four-wire method; a current detectionrange is 1 nA-100 mA; and a current density range is 10⁻⁴-10³ mA cm⁻²,so that the current testing requirements of the LED may be satisfied.The upper computer realizes a function of interactive communication withthe luminance meter, Keithley 2400 source meter and industrial controlcamera CCD, acquires the collected spectrum, spectral power, voltage,current and detection images, and realizes the real-time displayfunction; and the sample test bench is responsible for placing LEDsamples and achieves a function of three-dimensional positionadjustment, so that clearer observation and more accurate measurementare realized, thereby achieving a purpose of optimal property test.

FIGS. 13A, 13B, and 13C are schematic diagrams of optoelectronicproperty test data of an optoelectronic device according to anembodiment of the present application and an optoelectronic deviceformed by manufacturing the optoelectronic device according to anembodiment of the present application. A horizontal axis in FIG. 13Arepresents the voltage loaded to two ends of the LED, in volt (V); and avertical axis represents the current density flowing through the LED, inmA cm⁻². A lighting voltage of a mini LED is 2.8 V. When the voltage is6.0 V, the current density reaches 923.8 mA cm⁻². A horizontal axis inFIG. 13B represents the voltage loaded to two ends of the LED, in volt(V); a vertical axis represents the luminance of LED, in cd m⁻². Whenthe voltage is 5.7 V, the luminance of LED reaches 1070.5 cd m⁻²; andthe area of a light-emitting region is 0.04 mm². A horizontal axis inFIG. 13C represents a current density flowing through the LED, in mAcm⁻²; and a vertical axis represents the EQE of the LED, in %. A maximumEQE of the micro LED is about 15.2% (4.11×10⁻² mA cm⁻²). Therefore, theoptoelectronic device provided by the present application and theoptoelectronic device formed by manufacturing the optoelectronic deviceprovided by the present application not only realize miniaturization andmicrominiaturization, but also solve the problems of low EQE, lowluminance and large leakage current of mini and micro optoelectronicdevices.

In one embodiment, the optoelectronic device and the manufacturingmethod of the optoelectronic device provided by the present applicationare applicable to mini and micro optoelectronic devices, wherein thecharacteristic size of a single light-emitting pixel or effectiveworking region is greater than or equal to 200 microns and less than orequal to 500 microns; and the characteristic size of a singlelight-emitting pixel or effective working region is less than or equalto 200 microns.

Further, the optoelectronic device provided by the present applicationmay also be manufactured by: a method I of directly preparing theoptoelectronic device on a mini or micro substrate with a size of lessthan or equal to 500 microns, or a method II of preparing anoptoelectronic device with conventional size by an etching method,wherein the etching method includes laser processing, plasma etching,FIB etching, EBL etching and the like.

Finally, it should be stated that the above embodiments are only usedfor explaining the technical solutions of the present invention, ratherthan limiting the present invention. Although the present invention isdescribed in detail with reference to the above embodiments, thoseordinary skilled in the art should understand that the technicalsolutions recorded in the above embodiments may still be modified, orpart or all of technical features may be equivalently replaced; and themodifications or substitutions will not make essence of thecorresponding technical solutions depart from the scope of the technicalsolutions in various embodiments of the present invention.

We claim:
 1. A manufacturing method of an optoelectronic device, wherein a characteristic size of a single light-emitting pixel or effective working region of the optoelectronic device is less than or equal to 500 microns, and the manufacturing method comprises: S1: providing a semiconductor substrate; S2: forming a photoresist layer; S3: using a mask for exposing and developing the photoresist layer, so that a first partial region on the semiconductor substrate is protected by the remaining photoresist layer, and a second partial region around the first partial region is exposed; S4: forming a first insulation layer, wherein the first insulation layer covers an upper surface of the remaining photoresist layer and an upper surface of the semiconductor substrate corresponding to the second partial region, and the thickness of the photoresist layer is greater than the thickness of the first insulation layer; S5: performing a photoresist stripping process to remove the remaining photoresist layer and the first insulation layer on the remaining photoresist layer; S6: forming a first transport layer, and making the first transport layer cover the upper surface of the first insulation layer and the semiconductor substrate in the first partial region; S7: forming an interface layer on the first transport layer; S8: forming a light-emitting material layer on the interface layer; S9: forming a second insulation layer, and making the second insulation layer cover a light-emitting material layer in the second partial region and a light-emitting material layer near a second partial region side in the first partial region, so that a central region in the first partial region is not covered by the second insulation layer; and S10: forming an electron transport layer in the central region of the first partial region.
 2. The manufacturing method of the optoelectronic device according to claim 1, further comprising S11: forming a metal electrode on the electron transport layer in the central region of the first partial region, and extending the metal electrode to the second insulation layer at one side of the central region.
 3. The manufacturing method of the optoelectronic device according to claim 1, wherein the light-emitting material layer is a perovskite material layer.
 4. The manufacturing method of the optoelectronic device according to claim 1, wherein the light-emitting material layer is a combination of perovskite materials and one or more of organic materials, III-V materials, II-VI materials, IV materials, rare earth materials, oxide materials, semiconductor nanomaterials and insulation materials.
 5. The manufacturing method of the optoelectronic device according to claim 1, wherein the first transport layer is a hole transport layer.
 6. The manufacturing method of the optoelectronic device according to claim 1, wherein the material of the first insulation layer is any one of silicon dioxide, aluminum oxide, silicon nitride, silicon carbide and aluminum nitride, or a combination of multiple materials.
 7. The manufacturing method of the optoelectronic device according to claim 1, wherein the light-emitting material layer is in direct contact with the interface layer.
 8. The manufacturing method of the optoelectronic device according to claim 1, wherein the size of the electron transport layer is adjusted by adjusting the size of the light-emitting material layer covered by the second insulation layer in the first partial region and adjusting the size of the central region not covered by the second insulation layer in the first partial region.
 9. The manufacturing method of the optoelectronic device according to claim 1, wherein the position where the second insulation layer is formed is limited by the mask, so that only the light-emitting material layer near a second partial region side in the first partial region is covered by the second insulation layer.
 10. The manufacturing method of the optoelectronic device according to claim 1, wherein the position where the electron transport layer is formed is limited by the mask, so that the electron transport layer is only formed in the central region of the first partial region.
 11. An optoelectronic device, wherein a characteristic size of a single light-emitting pixel or effective working region of the optoelectronic device is less than or equal to 500 microns, and the optoelectronic device comprises: a semiconductor substrate, wherein a first transport layer is formed on a first partial region of the semiconductor substrate; a first insulation layer is formed on a second partial region around the first partial region; and the first transport layer is formed on the first insulation layer; an interface layer is formed on the first transport layer; a light-emitting material layer is formed on the interface layer; a second insulation layer is formed on the light-emitting material layer in the second partial region and on the light-emitting material layer near a second partial region side in the first partial region; and an electron transport layer is formed on the light-emitting material layer in the central region in the first partial region.
 12. The optoelectronic device according to claim 11, wherein the light-emitting material layer is a perovskite material layer.
 13. The optoelectronic device according to claim 11, wherein the first transport layer is a hole transport layer.
 14. The optoelectronic device according to claim 11, wherein the light-emitting material layer is in direct contact with the interface layer.
 15. The optoelectronic device according to claim 11, wherein the size of the electron transport layer is adjusted by adjusting the size of the light-emitting material layer covered by the second insulation layer in the first partial region and adjusting the size of the central region not covered by the second insulation layer in the first partial region.
 16. The optoelectronic device according to claim 11, wherein the material of the first insulation layer is any one of silicon dioxide, aluminum oxide, silicon nitride, silicon carbide and aluminum nitride, or a combination of multiple materials. 